EZ530 Therm System

Overview

Overview

The EZ530 Therm system (referred to throughout the source manual as the EZ-THERM Series / Eazy-THERM) is a benchtop, non-contact thermal imaging and analysis platform built around Thermoreflectance (TR) microscopy, with optional Infrared (IR) and Near-Infrared (NIR) imaging channels. It is a precision analysis tool for static (steady-state) and transient thermal imaging of active semiconductor devices, at scales ranging from millimeter down to micron/sub-micron.

What it measures: The system measures device surface temperature indirectly by detecting the relative change in optical reflectivity of a sample as its temperature changes (thermoreflectance), and/or by measuring infrared thermal emission (IR mode). It can simultaneously support up to three different sensors (Visible/TR, IR, and NIR/InGaAs).

Hardware family / platform notes (internal):

Major system components (per source Section 3, "System Description" — any system shipped to a customer includes):

  1. Optical Microscope
  2. Camera (Visible / IR / NIR / sCMOS / InGaAs, per configuration)
  3. Standard Rack Models
  4. Probe Station (Option)

Core software: The system is operated through SanjVIEW™ v7.0, embedded software running on the SanjCONTROLLER+ integrated desktop computer, which connects and manages all hardware modules. SanjVIEW 7 provides: Project Manager, Transient Thermoreflectance, Movie Mode, FA (Failure Analysis) Mode, Calibration, and SanjANALYZER™.

Safety Precautions

Safety Precautions

(Source Section 1.1–1.2)

Specifications

Specifications

NT220 Platform Specification Table

(Source Section 5, "Nano THERM Specification." The EZ530 corresponds to the PKG-2 column — see Overview note above.)

Parameter Base PKG-1 PKG-2
Transient Response 50 ns LED Pulse Duration (FWHM), 12.5 ns Delay Resolution (all tiers)
Operating System SanjCONTROLLER™ with embedded SanjVIEW, for system management, image data acquisition, and data processing/analysis (all tiers)
Display 32-inch 4K Monitor, Keyboard & Mouse (all tiers)
Operating Temperature 10 °C to 35 °C 10 °C to 35 °C 10 °C to 35 °C
Power 120V/240V, ~1500W 120V/240V, ~2000W 120V/240V, ~2500W
Rack Size (D x W x H) 36" x 24" x 29" 36" x 24" x 46" 36" x 24" x 46"
Electronics Rack Weight 190 lbs (~90 kg) 210 lbs (~95 kg) 260 lbs (~120 kg)

Selectable SanjSOURCE™ illumination models (as listed in the source; the exact model-to-tier mapping is not made explicit in the source table):

CTR PIEZO Calibration (available as an after-purchase option, AF-100 or AFP-200):

AF-100 AFP-200
Temperature Range 20 °C to 120 °C ±1% Typ 20 °C to 150 °C ±1% Typ
Leveling Adjustment ±5 Degrees ±2 Degrees
Heating/Cooling Capacity 50 W 500 W
Stage Working Area 40 mm x 40 mm 125 mm x 125 mm

Probe Station (available as an after-purchase option, SPS-400 or GPS-150):

SPS-400 GPS-150
Chuck 4" Vacuum Chuck 6" Vacuum Chuck
X-Y Travel 100 mm x 100 mm 150 mm x 150 mm
Probes 3 DC Probes 3 DC Probes

Facilities & Power Requirements

(Source Section 2)

Optical Microscope & Illumination

(Source Section 3.1)

The Optical Microscope allows the user to change objectives and use a manual focus knob. Two main adjustments are used routinely: focusing via the frame knobs, and changing objectives on the nosepiece. The camera adapter can be rotated by loosening threaded screws with the provided blue Allen wrench.

[diagram/image in source — not reproduced here: Figure 1 Microscope Frame & C-Mount Fiber Illumination for LLGVIS8; Figure 2 C-Mount Fiber Illumination for LLGVIS8; Figure 4 Microscope Dimensions; Figure 5 Microscope Views; Figure 6 Camera]

LLGVIS8 / LLGNIR8 fiber illumination specifications:

LLGVIS8 LLGNIR8
Wavelength Range 340 nm to 800 nm 420 nm to 2000 nm
Numerical Aperture 0.59 0.59
Half Angle 36° 36°
Minimum Bend Radius 60 mm 60 mm
Core Diameter 5 mm 5 mm
Length 8 ft (2.4 m) 8 ft (2.4 m)
Temperature Range (Continuous) -5 to 35 °C (23 to 95 °F) -5 to 35 °C (23 to 95 °F)

Cameras

(Source Sections 3.2–3.5)

Chiller Specifications

(Source Sections 3.10–3.11)

500W Internal Chiller — RMUP-500 (Optional): 6U rack-mount design; ±0.1°C temperature stability via PID control; refrigerating power up to 650W; 220V supply; front-mounted water level indicator; water temperature settable between 5°C and 35°C in constant-temperature or intelligent-control mode.

500W External Chiller:

Model CWUL-10DH CWUL-10AH
Voltage/Frequency AC 110V / 60Hz AC 220V–240V / 50Hz
Current 0.5–9.9A 0.5–7.2A
Cooling Capacity 750W 750W
Max Pump Pressure 1.2 bar 1.2 bar
Max Pump Flow 13 L/min 13 L/min

Piezo Controller (AF-200)

(Source Section 3.12)

Digital Multi-Channel Piezo Controller with 20 kHz sampling rate and 1 ms cycle time. AF-200 provides 3-axis XYZ positioning with 200 x 200 x 200 µm travel range and ±2° tip-tilt adjustment.

ATEC302 Temperature Controller

(Source Section 3.13)

Bi-directional temperature controller/indicator for thermoelectric applications.

Optical Head Models

(Source Section 5, "Single/Dual TR Mount Optical Heads")

Single TR Mount Optical Heads:

Model Sensor Spectral Range Resolution FOV NETD
SMC40-VIS2PK 2MP CMOS 400 nm to 800 nm 59 nm/pixel @100x 2.3 x 1.4 mm @5x 100 mK
SMC40-VIS4PK 4MP CMOS 365 nm to 1050 nm 55 nm/pixel @100x 2.3 x 2.3 mm @5x 250 mK
SMC40-NIRIPK InGaAs, 630 x 508 pixels 900 nm to 1700 nm 150 nm/pixel @100x 3.8 x 3.0 mm @2.5x —
SMC40-NIREPK 1MP EMCCD 480 nm to 1060 nm 130 nm/pixel @100x 5.3 x 5.3 mm @2.5x —

Included VIS Band Objectives: 5x (5SVIS35), 20x (20SVIS22), 100x (100SVIS14). Included NIR Band Objectives: 2.5x (2.55NIR12), 20x (20SNIR12).

Dual TR Mount Optical Heads:

Additional Accessories and Options

(Source Section 5)

Infrared Sensor:

Other accessories:

Setup and Installation

Setup and Installation

Connecting the EZ-THERM System

(Source Section 4. Ensure all modules are powered off before making any connections. Complete all connections and power on all modules before running the SanjVIEW 7 software.)

4.1 Power up Eazy-THERM. Before powering on, confirm the Main Power Strip is connected to the proper outlet (110V or 220V). Power-up includes the SanjSCOPE, 2 Power Distribution Units (PDUs), and the optional battery backup power supply.

4.2 SanjSCOPE. SanjSCOPE includes the chiller power switch, the master power switch, and the Emergency Off (EMO) button.

4.3 Battery Backup Power Supply (Optional). Protects sensitive equipment during power surge events and allows the user to save data before shutdown.

4.4 Power Distribution Units.

Power-on sequence (after confirming the Main Power Strip is plugged into a suitable outlet):

  1. Ensure the Red Emergency Off (EMO) button is released (turn counterclockwise).
  2. Flip the Master and Chiller switches to the ON position.
  3. Press the 4D-Nano power button.
  4. Press the SanjCONTROLLER+ power button.
  5. Press the Chiller power button (may apply to external chiller models).

[diagram/image in source — not reproduced here: Figure 14, annotated power-up steps]

4.5 Chiller Connecting. Chiller (internal or external) cooling fluid hoses connect to the 4-inch or 6-inch thermal stage of the system.

4.6 Components for the Eazy-THERM system:

  1. Visible Camera and USB 3.0 camera cable, connected in SanjCONTROLLER+.
  2. Power (Master distributor) and Ethernet cable for the InGaAs camera.
  3. Microscope with lenses.
  4. Thermocouple TC-01, connects to SanjCONTROLLER+.
  5. Thermal Electric Cable connecting the thermal stage to the 4D-Nano.
  6. IR cable connecting the IR camera to SanjCONTROLLER+.
  7. HDMI cable connecting the monitor to SanjCONTROLLER.
  8. Piezo cable connecting the Piezo stage to the Piezo Controller located in the 4D-Nano.
  9. Liquid Lightguide (visible or near-infrared LED) between the microscope and SanjController+.
  10. Test sample.
  11. Computers equipped with wireless network connectivity.

4.7 Connecting Eazy-THERM with AF200. [diagram/image in source — not reproduced here]

4.8 SanjSOURCE (rear panel), dedicated connectors. [diagram/image in source — not reproduced here]

4.9 Connecting SanjCONTROLLER+ (rear panel), dedicated port connections. [diagram/image in source — not reproduced here]

TEA Test Sample Setup

(Source Section 6)

The Microsanj TEA test kit includes: the Microsanj-TEA test sample, three 2 mm screws, a nonconductive thermal paste, and a bias cable connector with a BNC connector. The BNC connector is pre-wired to series resistors (D1) and a diode (D2) in the test sample.

[diagram/image in source — not reproduced here: TEA sample, BNC cable, screws, and thermal paste layout]

Prepare Hardware and Connections:

  1. Apply a small amount of thermal paste evenly to the center of the thermal stage (or the back-side metal area of the sample) for good heat transfer.
  2. Secure the Microsanj-TEA test sample to the thermal stage using screws or clamps.
  3. Plug the BNC cable into the VO INT Output.
  4. Plug the connector from the BNC cable into the test sample.
  5. Plug the thermal sensor attached to the test sample into the thermal reader.

Maintenance

Maintenance

(The source manual does not include a dedicated, separate "Maintenance" chapter beyond the items above — this section consolidates all explicit maintenance/servicing guidance found elsewhere in the source.)

Appendix — Thermoreflectance Technical Reference

Appendix — Thermoreflectance Technical Reference

(Source Appendix A/B — retained here as background reference material.)

Thermoreflectance Imaging Fundamentals

Thermoreflectance imaging is based on a linear change in a material's reflection coefficient with temperature (Equation 1 in the source: ΔR(x,y,λ)/R(x,y,λ) = Cth(x,y,λ)·ΔT, where Cth — the thermoreflectance calibration coefficient, typically 10⁻³ to 10⁻⁵ per °K — depends on sample material, illumination wavelength, angle of incidence/surface roughness, and sample composition). This is a highly sensitive lock-in technique measuring per-pixel changes in reflected light, sensitive to shifts/thermal expansion at length scales of 580 nm at 20x magnification. Proper experimental setup and surface condition are important for measurement quality. First noted in the 1960s.

Reference publications cited in the source:

Because reflection changes are imperceptible to the human eye, the system relies on high-resolution, low-noise equipment and sophisticated averaging. The NT220 provides two averaging modes:

Thermoreflectance Material Coefficient

The thermoreflectance coefficient is a material property that depends on temperature and illumination wavelength. Unlike IR emissivity, it is not strongly dependent on surface preparation or deposition method, so per-device calibration is generally not necessary (e.g., Microsanj has found consistent thermoreflectance coefficients for gold across various thermal/E-beam evaporation techniques). If the material's visual color changes significantly due to major microstructure/porosity changes, the coefficient may be modified significantly. Microsanj provides thermoreflectance coefficients for basic IC materials at the system's included LED colors. For new material systems: the coefficient can be extracted directly if there's an embedded on-chip temperature sensor near the ROI; otherwise, a small chip sample (1x1 mm² up to 1x1 cm²) can be sent to Microsanj for in-house characterization.

For a region of interest covered in Aluminum, use the provided 780 nm LED — the coefficient is too small at 530 nm (green) or 470 nm (blue) for usable thermal images.

Additional reference materials cited:

Dielectric coatings: Coatings change the reflectance coefficient and therefore the thermoreflectance coefficient. Where uncoated regions exist on the sample, use temperature continuity on the surface to calibrate the image; otherwise, Microsanj can determine the coefficient for a coated sample if a small piece is provided. Thin-film interference can cause oscillations in the reflected data on samples with non-uniform film thickness (an inherent optical property) — averaging measurements across different color LEDs can help detect and remove this oscillation envelope/optical artifact.

Microscope objective numerical aperture: The thermoreflectance coefficient can depend on objective NA due to the light component polarized perpendicular to the surface (non-negligible above NA ~0.5). Microsanj-provided coefficients specify the objective and illumination LED used. For precise temperature-distribution measurements with high-NA lenses, it's suggested to first measure with a low-NA lens over a larger area, then switch lenses (without altering the device) and scale the temperature data accordingly. Standard objectives are optimized for the visible (VIS) band but can be used beyond that range with reduced sensitivity; Microsanj offers objectives optimized for NUV or NIR performance.

Measurements at different ambient temperatures: Thermoreflectance can operate over a wide temperature range down to cryogenic temperatures — Microsanj has imaged gold contact layers in small devices with sub-micron spatial resolution from 10 K to 800 K. For measurements below 5–10°C, use a cryostat with an optical window to avoid water condensation on the sample.

CCD Camera / 4D Nano Align Temperature Controller Reference

(Source Sections 13.1–13.2 — content in the source consists entirely of figures/tables with no extractable body text.)

[diagram/image in source — not reproduced here: Section 13.1 CCD Camera reference; Section 13.2 4D Nano Align Temperature Controller Reference]

Source Documents

Source Documents

This reference was compiled from:

Figures, diagrams, and screenshots referenced in the source are marked [diagram/image in source — not reproduced here] throughout this document rather than reproduced or guessed at.

Operation

Operation

SanjVIEW 7 Software — Overview

SanjVIEW 7 Software — Overview

(Source Section 7)

The EZ-THERM General Purpose Thermal Analyzer is a Thermoreflectance (TR) system: a benchtop precision analysis tool for static and transient thermal imaging of active semiconductors from millimeter to micron scale. The EZ-THERM Controller supports Thermoreflectance-based (TR) thermal imaging and can simultaneously support up to three different sensors. The embedded SanjVIEW™ v7.0 software lets the user acquire, analyze, and output high-resolution thermal images. SanjVIEW v7.0 elements (all reached from Project Manager):

Project Manager

SanjVIEW is launched from the Windows 10 start screen shortcut. Once the license is verified, the Project Manager window opens, offering:

Key features of the Project Manager window:

[diagram/image in source — not reproduced here: Figure 1, Project Manager Window]

Starting a new thermal imaging session:

  1. Place the Device Under Test (DUT) on the probe station.
  2. In Project Manager, confirm all components show a green status light (unless the NIR camera is unavailable).
  3. Select the desired illumination option and Channel Number, and focus the microscope. A live image of the DUT appears on the right.
  4. Check "Auto" under LED Brightness to auto-adjust brightness (Visible Camera).

Note: Transient Thermoreflectance options are not available when imaging with infrared (IR) light — LED illumination is disabled during an IR session.

Viewing temperature response in DC mode: While Project Manager is running, approximate temperature values are shown on the camera measurement window as a scrolling average of the drawn Region of Interest (ROI); if no ROI is drawn, the entire image is averaged. Use the rectangle tool to draw an ROI. In DC mode, the user can select different outputs and the output voltage to the device, the TC-100 stage, or the Relay output.

[diagram/image in source — not reproduced here: Figure 2, EZ500A with Microsanj test sample in DC mode; Figure 3, DC mode with heater under bias]

Right-click the image window to directly save the acquired image and its color palette.

Transient Thermoreflectance (TR)

Acquires new thermal imaging data for pulses between 50 μs and 5 ms (transient).

[diagram/image in source — not reproduced here: Figures 4–5, Transient Thermoreflectance Window]

Key features:

Example — obtaining a transient measurement:

  1. Turn off the "Int Vo 20mA Range" button in Project Manager.
  2. Set "DUT Pulse" to the desired pulse width (example: 500 µs).
  3. Set "Voltage to Device" (example: 6.0 V) and select "Update Values."
    1. Switch to "Thermal Imaging" mode.
    2. Confirm the device is heating as expected for the 500 µs delay.
  4. Set "Image Delay(s)" to 0 to initialize delay to 0 µs (a transient measurement can start at any initial delay time).
  5. Go to File → Setup Sweep (see Figure 6).
  6. Enter "Number Delay Images" (example: 51).
  7. Enter "Delay Steps(s)" (example: 10.0 µs) — the software takes 51 images at 10 µs steps starting at 0 s (0–500 µs).
  8. Enter "Ave time per frame(s)" (example: 5 s) — the software averages for 5 s at each image.
  9. Enter the "Base File Name" to save under.
  10. Select an ROI with the "Draw ROI" tool to monitor the region's temperature response.
  11. Press "Start."
  12. The software steps through the thermal transient automatically and shuts off the voltage when complete. A thermal image is averaged and saved every 5 s (example: 255 s total for 51 data points ≈ 4 min 15 s).
  13. Once complete, exit and open the saved data in SanjANALYZER.

Note: The transient response of an ROI can be monitored live in the "Region Mean Graph" tab (lower left) by selecting a region with "Draw ROI." A small 5 µm gold heater, for example, reaches thermal equilibrium within a few microseconds due to its small thermal mass.

[diagram/image in source — not reproduced here: Figure 6, Setup Sweep dialog]

Movie Mode (TR and IR)

Acquires thermal imaging data for pulses longer than 5 ms (quasi steady state); used to view longer-timescale IR/TR thermal events. In TR mode, SNR may be reduced relative to Transient or FA mode — localize thermal events first, then use Movie Mode for further study.

[diagram/image in source — not reproduced here: Figure 7, Movie Mode Window]

Key features:

Adjusting the Movie Mode time window: Options → Software tab → "Movie Mode Length" dropdown, sets the time window (3–30 seconds).

[diagram/image in source — not reproduced here: Figure 8, Movie Mode time window option]

Example — obtaining a Movie Mode image:

  1. Connect the DUT to Voltage Out (AUX Output is optional).
  2. Select biasing conditions via the Device Control panel and click "Update Values."
  3. While the image is averaging, use the ROI tool, scale bars, and Thermal Image Display tool to optimize the image.
  4. Once the desired thermal image is achieved, save a data file for further analysis/output.

FA Mode (TR and IR)

A simplified differential-imaging mode for quickly acquiring thermal images for fault localization.

[diagram/image in source — not reproduced here: Figures 9–10, FA Mode Window]

Key features:

Calibration — Quick Start

Calculates the thermoreflectance coefficient (TR) or emissivity (IR) of specific surfaces on a device. Accurate temperature readings require the coefficient measured from calibration. The calibration module thermally cycles the DUT while reading back the thermocouple to measure calibration coefficients for the different materials in the image; coefficients are continuously averaged during cycling to increase SNR. Coefficient maps can be obtained and used for point-by-point calibration.

[diagram/image in source — not reproduced here: Figure 11, Calibration window (thermoreflectance); Figure 12, Calibration window (infrared)]

Key features:

Verifying calibration with TCAT-100 in Pulsed Mode: Set up a test sample as for calibration. Launch the Pulsed Mode software and select TCAT-100 as the output device. Enabling thermocouple readback allows simultaneous display of the thermocouple signal alongside the Thermoreflectance or Infrared data. Calibrated IR camera results should closely overlap the thermocouple results. The TCAT thermocouple has a response time of ~0.5 seconds — lengthen the timescale if needed to see an accurate response.

[diagram/image in source — not reproduced here: Figure 13, pulsed mode operation on the Microsanj test sample; Figure 14, final calibrated measurement in Pulsed Imaging mode]

SanjANALYZER™ — Thermal Image Analyzer

A fully integrated analysis package for low-frequency and transient thermal imaging data, used to:

[diagram/image in source — not reproduced here: Figure 15, SanjANALYZER™ Analysis Window]

Key features:

Example — analyzing a transient thermoreflectance image:

  1. Select the first image of the transient series.
  2. Enter the "number of images in the series" (example: 51).
  3. Select an ROI box over the area of interest (example: 5 µm gold heater).
  4. Select "Process Series" — the software steps through the series and plots data in the "ROI Mean Series" (bottom left). Right-click the y-axis to auto-scale the graph.

Output Module

(Source Section 7.7)

Signal Input/Output Function
VI EXT (A) — DC Voltage in Input Used in "Relay" mode for pulsing the device. ±60V, 3A maximum.
VO EXT (B) — DC Voltage in Output Modulated output of the VI DC input voltage.
AUX INT (C) — Aux out Output ±10V, 500 mA max (not pulsed).
VO INT (D) — Voltage out Output Main output. ±10V, 1A maximum. In "Relay" mode: ±60V, 3A max.
VO INT (D) (20 mA Range) — 20 mA out Output 500 Ω output impedance, approx. 2 mA/V into low impedance.
TRIG (E) — Trigger out (Movie mode only) Output Synchronizes external equipment with Movie mode. TTL high-impedance output.
Operation

Operating SanjVIEW 7 with the Visible Camera (TR)

Operating SanjVIEW 7 with the Visible Camera (TR)

(Source Section 8)

Opening the software and setting up a session:

  1. Open SanjVIEW v7.0 from the computer desktop; center the sample in Project Manager and focus on the target device.
  2. System Status — ensure all indicator lights are green for the connected system.
  3. Select Camera to Use — available cameras: Infrared (IR), Visible – Thermoreflectance (TR), Near Infrared (NIR). Press F1 to switch cameras.
  4. Click the Auto Focus tab.
  5. Set "Mag" to the objective in use (example: 5X).
  6. Click "Enable Motion" ON and "Center Stage" ON. (The microscope may need refocusing after centering the stage.)
  7. Click the file icon; name the file path and click "current folder."
  8. Select the desired imaging operation.

Note: Transient Thermoreflectance is only available when a Visible camera is selected (not with an Infrared camera).

Steady State

8.1.1 Hardware

  1. Enter the desired Base Temp (°C) and click "SET" next to Set Base Temp.
  2. Set Stage State ON.
  3. Set "Vo ON Voltage" to 7V.

8.1.2 Timing / Illumination

  1. Set Device On Time to 10.
  2. Set Image Averages (cycle) to 10.

8.1.3 3D Alignment — Focus ROI

  1. Select a region on the CCD image using the rectangle tool — choose a unique feature (e.g., edges, scratch marks).
  2. Press Focus ROI to set the selected region as the ROI.
  3. Wait a few seconds until the Focus ROI light turns green.
    • Note: To zoom, use the magnifying glass; hold SHIFT to zoom out, SHIFT+click to zoom in.
  4. Ensure "Enable 3D NanoAlign" is checked.

8.1.4 3D Alignment — Capture Reference

  1. After the ROI is focused, press Capture Reference to set it as the Reference region.
  2. Wait for the Capture Ref light to turn green ("Enable Digital Anti-vibration" turns on automatically).
  3. Set initial Focus Tolerance, Alignment %, and Vibration Filter parameters — lights turn green when the image is in range.
    • Note: Increasing Alignment % and decreasing Vibration Filter improves alignment accuracy. Alternatively, load a prior reference for easier alignment.

8.1.5 Start Measurement

  1. Click "START Measurement" to begin.
  2. Progress displays in the System Status bar; "Turn OFF" appears after each cycle; "Loop Iterations" tracks cycle count (9–11 iterations is sufficient for TR).
  3. Under Save Path, confirm the directory/name are correct — save in C:\Data\Qualification\, appending the filename to the path.
  4. Click "Save Every Cycle." Click "Save Data" when ready. (Save the image before stopping the measurement.)
  5. To stop: click "STOP MEASUREMENT," then "Return to Project Manager," or File → Quit.

Calibration

8.2.1 Hardware

  1. Set "Magnification" to match the objective (example: 5x).
  2. Set "High Temp" to 120°C and "Base Temp" to 20°C.
  3. Turn "Stage State" ON.
  4. Click "Set Low Temp" to initialize the chuck to the base temperature.
  5. Click "Use Chuck Sensor" to use the embedded chuck thermal sensor, or leave off to use an external thermal probe.

8.2.2 Timing/Illumination

  1. Set Stage Heating Time to 40.
  2. Set Image Averages to 50.

8.2.3 3D Alignment — Focus ROI: same procedure as 8.1.3.

8.2.4 3D Alignment — Capture Reference: same procedure as 8.1.4. Alternative: click "Load Reference," select a previously saved file, and wait for the "Load Reference" light to turn green.

8.2.5 Start Measurement

  1. Click "START Measurement."
  2. The calibration cycles through temperatures; progress shown in System Status, "Calibration Done" after each cycle, "Loop Iterations" tracks count.
  3. Select a region on Thermal Image View to read the sample's Calibration Factor live, shown in "Mean CTR."
  4. Under Save Path, confirm directory/name — example: C:\Data\Qualification\Training.
  5. Under Save Image, click "Save Every Cycle," then "Save Data" when ready. (Save before stopping.)
  6. To stop: "STOP MEASUREMENT," then "Return to Project Manager," or File → Quit.

Failure Analysis (FA) Mode

8.3.1 Parameter Setup

  1. In Project Manager, set "Cam Selection (F1)" to VISIBLE.
  2. Uncheck "INT Vo 20mA Range" (green = checked, grey = unchecked).
  3. File → Options.
  4. Software tab → set "FA Mode Pulse Width" to Long (15 Frames).
  5. Return to Project Manager and click "FA Mode."

8.3.2 Process

FA Mode confirms the device is biased and conducting current before using Movie Mode / Transient Mode.

  1. Go to the "Biasing" tab.
  2. Change Vo(V) to 7.000.
  3. Click "Update Values."
  4. Confirm "Peak Voltage (V)" and "Peak Current (I)" read near 7V and 70 mA for device 2 (Center Diode).
    • Note: If current is much lower than expected, confirm "INT VO 20mA Range" is unchecked in Project Manager.

8.3.3 Save Data

  1. File → Save Data.
  2. Click File Browser, choose the save folder, click "Current Folder" (example: C:\Data\Qualification\Training).
  3. Enter the file name (example: "FA-File").
  4. Click "Save."
  5. Click "Return" to close the pop-up.
    • Note: Change the Microsanj Data Save Path before saving a new data set, to avoid overwriting previous data.

Transient Thermoreflectance

8.4.1 System Status

  1. Change Camera to VISIBLE.
  2. Click Transient Thermoreflectance.
  3. Click "Measurement Settings" tab.

8.4.2 Measurement Setting

Two alignment approaches:

8.4.3 Transient Thermoreflectance — Single Image

(Thermal Image should appear before proceeding.)

  1. In Measurement Settings, set "Voltage to Device (V)" to 7V.
  2. Click "Update Values."
  3. Leave "DUT Pulse," "LED width," and "Acq Period" at their automatically-inserted initial values (in this example — they can be changed).
  4. Click "Start Measurement."
  5. Wait ~30 s or until noise averages out, then File → Save Data.
  6. Choose a save location via File Browser, enter the file name, click "Save."
  7. Click "Measurement Running" to stop.

8.4.4 Transient Thermoreflectance — Series

  1. In Measurement Settings, set "Voltage to Device (V)" to 7V.
  2. Click "Update Values."
  3. Leave "DUT Pulse," "LED width," and "Acq Period" at automatic values (can be changed).
  4. Set "Image Delay" to 0s. Click "Update Delay."
  5. File → Setup Sweep.
  6. Choose the save location via File Browser (click "current folder") and append the desired file name.
  7. Enter "Number Delay Images" (example: 10).
  8. Enter "Delay Step" (example: 50 µs) — the DUT Pulse increment per frame.
  9. Enter "Ave time per frame" (example: 30 s).
  10. Click "START" to begin acquisition.
  11. When the designated number of images is collected, the Start button turns green again — click "Close" to exit the dialog, then click "Measurement Running" to stop.

SanjAnalyzer

8.5.1 System Status

  1. Confirm Camera is set to VISIBLE.
  2. Click SanjAnalyzer to open the "SanjVIEW Image Analyzer" window.

8.5.2 Process Data

  1. Select the Calibration tab.
  2. Select "Point to Point" under "Method" — a "Load CTR Map" window appears.
  3. Click the Browse icon and select the calibration image.
  4. Click "LOAD" to overlay the calibration image onto the selected test image.
  5. In the file window (top left), click Browse and select the file to analyze (double-click). (If the file isn't listed, click "UP Dir" to change directory.)
  6. Drag an ROI box across the specimen with the rectangle tool to measure temperature in that range — up to 5 ROI boxes can be drawn (hold Ctrl while selecting additional boxes) to compare locations.
  7. Adjust the temperature scale and image-averaging factors as desired (optional).
  8. Select "Settings" tab, choose a save path via Browse, and click "Save Image Current View" to save the processed image.
  9. To process a series: enter the file count in "Number of Images in Series" and click "Process Series" — the ROI Mean graph plots mean temperature of the selected ROIs over time.
    • Note: Right-click the graph → Export → "Export Data to Clipboard" to export data to a table.
Operation

SanjVIEW 7 for Near Infrared (NIR) Camera

SanjVIEW 7 for Near Infrared (NIR) Camera

(Source Section 10)

Camera Selection (F1) Select LED (F3)
VISIBLE 405, 470, 530, 780 nm
NIR 1050, 1100, 1200, 1300 nm
Operation

SanjVIEW 7 for Infrared Camera (IR)

SanjVIEW 7 for Infrared Camera (IR)

(Source Section 11)

Opening the software and setting up a session:

  1. Open SanjVIEW v7.0 from the desktop; center the sample in Project Manager and focus on the target device.
  2. System Status — ensure all indicator lights are green.
  3. Select Camera to Use — Infrared (IR), Visible – Thermoreflectance (TR), Near Infrared (NIR). Press F1 to switch.
  4. Click "Temp Control" tab; toggle ON/OFF and view readings for Stage, Thermal Coupler (TC), and ROI. Set the setpoint (example: 75), then click "Stage State" to turn on the stage.
  5. Click the "Auto Focus" tab (Piezo system control); select objective magnification (example: 5X).
  6. Click "Enable Motion" ON and "Center Stage" ON to center the Piezo controller. (Microscope may need refocusing after centering.)
  7. Click the file browser icon; choose the save folder and click "Current Folder."
  8. Select the desired imaging operation.

Note: Transient Thermoreflectance is not available with the Infrared camera.

Steady State

Select "Steady State" from Project Manager.

11.1.1 Hardware

  1. Enter the desired Base Temp (°C) (example: 75) and click "SET."
  2. Turn Stage State ON.
  3. Set "Vo ON Voltage" to 7V.

11.1.2 Timing / Illumination

  1. Set Device On Time to 10.
  2. Set Image Averages (#cycle) to 10.

11.1.3 3D Alignment — Focus ROI: same procedure as 8.1.3.

11.1.4 3D Alignment — Capture Reference: same procedure as 8.1.4.

11.1.5 Start Measurement

  1. Click "START Measurement."
  2. Progress in System Status bar; "Turn OFF" after each cycle; "Loop Iterations" tracked (9–11 sufficient for TR).
  3. Under Save Path, confirm directory/name.
  4. Click "Save Every Cycle," then "Save Data" when ready. (Save before stopping.)
  5. Click "STOP MEASUREMENT," then "Return to Project Manager" or File → Quit.

Calibration

Select "Calibration" from Project Manager.

11.2.1 Hardware

  1. Set "Magnification" to match the objective (example: 5x).
  2. Set "High Temp" to 120°C and "Base Temp" to 75°C.
  3. Turn "Stage State" ON.
  4. Click "Set Low Temp" to initialize chuck temperature.
  5. Click "Use Chuck Sensor" for the embedded sensor, or leave off for an external thermal probe.

11.2.2 Timing/Illumination

  1. Set Stage Heating Time to 40.
  2. Set Image Averages to 50.

11.2.3 3D Alignment — Focus ROI: same procedure as 8.1.3.

11.2.4 3D Alignment — Capture Reference: same procedure as 8.1.4, with the Load Reference alternative.

11.2.5 Start Measurement

  1. Click "START Measurement."
  2. Progress shown in System Status; "Calibration Done" after each cycle; "Loop Iterations" tracked.
  3. Select a region on Thermal Image View to view the live Calibration Factor ("Mean CTR").
  4. Under Save Path, confirm directory/name (example: C:\Data\Qualification\Training).
  5. Click "Save Every Cycle," then "Save Data." (Save before stopping.)
  6. Click "STOP MEASUREMENT," then "Return to Project Manager" or File → Quit.

Failure Analysis (FA) Mode

11.3.1 Frame Rate Selection

  1. In Project Manager, set "Cam Selection (F1)" to INFRARED.
  2. Uncheck "INT Vo 20mA Range."
  3. File → Options.
  4. Software tab → set "FA Mode Pulse Width" to Long (15 Frames).
  5. Return to Project Manager and click "FA Mode."

11.3.2 Process

Confirms the device is biased and conducting current before using Movie Mode.

  1. Go to "Biasing" tab.
  2. Change Vo(V) to 7.000.
  3. Click "Update Values."
  4. Confirm "Peak Voltage (V)" and "Peak Current (I)" read near 7V and 70 mA for device 2 (Center Diode).
    • Note: If current is lower than expected, confirm "INT VO 20mA Range" is unchecked.

11.3.3 Save Data

  1. File → Save Data.
  2. Choose the save folder via File Browser and click "Current Folder" (example: C:\Data\Qualification\Training).
  3. Enter the file name (example: "FA-file").
  4. Click "Save."
  5. Click "Return" to close the pop-up.
    • Note: Change the Microsanj Data Save Path before saving new data, to avoid overwriting.

Movie Mode

Select "Movie Mode" from Project Manager.

11.4.1 Control Settings

  1. Set "Voltage to Device (V)" to 7V.
  2. Click "Update V."
  3. Set "DUT Pulse (s)" (example: 1s). Click "Update Timing."
  4. Confirm "Save Whole Series" is on (on by default).
  5. Click "File Path" icon (or type the path) and select a name.
  6. Click "Start Movie" on Movie Mode Acquisition.
  7. Click "Save Image."
    • Note: Movie Mode saves a series of a 105-file cycle when "Save Image" is clicked.

SanjANALYZER

11.5.1 System Status

  1. Confirm Camera is set to INFRARED.
  2. Click SanjANALYZER to open the "SanjVIEW Image Analyzer" window.

11.5.2 Process Data — identical procedure to Section 8.5.2 (Calibration tab → Point to Point → Load CTR map → select analysis file → draw up to 5 ROI boxes → adjust scale/averaging → Settings tab to save the processed image → optional "Process Series" for a file series).

Operation

Device Biasing, Trigger Function, and Timing

Device Biasing, Trigger Function, and Timing

(Source Section 9)

9.1 Diagram for TR Imaging — SanjCONTROLLER PLUS™ signals:

9.2 Relation to Timing Sequence for Transient Analysis. [diagram/image in source — not reproduced here]

The following subsections consist of diagrams in the source with no accompanying body text — content not reproduced here: