# Overview

# Overview

The EZ530 Therm system (referred to throughout the source manual as the **EZ-THERM Series** / **Eazy-THERM**) is a benchtop, non-contact thermal imaging and analysis platform built around **Thermoreflectance (TR)** microscopy, with optional Infrared (IR) and Near-Infrared (NIR) imaging channels. It is a precision analysis tool for static (steady-state) and transient thermal imaging of active semiconductor devices, at scales ranging from millimeter down to micron/sub-micron.

**What it measures:** The system measures device surface temperature indirectly by detecting the relative change in optical reflectivity of a sample as its temperature changes (thermoreflectance), and/or by measuring infrared thermal emission (IR mode). It can simultaneously support up to **three different sensors** (Visible/TR, IR, and NIR/InGaAs).

**Hardware family / platform notes (internal):**
- The underlying electronics/optics platform is referred to in the specification table (Section 5 of the source) as the **NT220 Platform**, offered in three power/configuration tiers: **Base**, **PKG-1**, and **PKG-2**.
- The Facilities Requirements section of the source manual is internally inconsistent about naming: the Table of Contents heading reads "NT220 Footprint with Dark box and Vibration Isolation Table," while the body text for the same section is headed "**EZ530** Footprint with Dark box and Vibration Isolation Table." Based on the matching Power Requirement (~2500W, 120V/240V, 20A) and matching electronics rack weight (~260 lbs / ~120 kg), **the EZ530 designation corresponds to the PKG-2 configuration tier of the NT220 platform**. This cross-reference is inferred from matching numbers in the source, not stated explicitly as such — flag for confirmation if this mapping needs to be authoritative.
- The source manual's software/UI descriptions (Section 7 and Figure captions) repeatedly reference the **EZ500A** and the **EZ500A SanjCONTROLLER** module (e.g., "The EZ500A SanjVIEW software controls two outputs from the EZ500A SanjCONTROLLER module," Figure 2 caption: "EZ500A with Microsanj test sample in DC mode"). This indicates the EZ-THERM Series / SanjVIEW 7 software and control architecture is shared across at least the EZ500A and EZ530 (NT220/PKG-2) hardware variants — the manual was evidently written as a general EZ-THERM Series document covering multiple rack/model configurations, of which the EZ530 is one.

**Major system components** (per source Section 3, "System Description" — any system shipped to a customer includes):
1. Optical Microscope
2. Camera (Visible / IR / NIR / sCMOS / InGaAs, per configuration)
3. Standard Rack Models
4. Probe Station (Option)

**Core software:** The system is operated through **SanjVIEW™ v7.0**, embedded software running on the **SanjCONTROLLER+** integrated desktop computer, which connects and manages all hardware modules. SanjVIEW 7 provides: Project Manager, Transient Thermoreflectance, Movie Mode, FA (Failure Analysis) Mode, Calibration, and SanjANALYZER™.