Specifications
Specifications
NT220 Platform Specification Table
(Source Section 5, "Nano THERM Specification." The EZ530 corresponds to the PKG-2 column — see Overview note above.)
| Parameter | Base | PKG-1 | PKG-2 |
|---|---|---|---|
| Transient Response | 50 ns LED Pulse Duration (FWHM), 12.5 ns Delay Resolution (all tiers) | ||
| Operating System | SanjCONTROLLER™ with embedded SanjVIEW, for system management, image data acquisition, and data processing/analysis (all tiers) | ||
| Display | 32-inch 4K Monitor, Keyboard & Mouse (all tiers) | ||
| Operating Temperature | 10 °C to 35 °C | 10 °C to 35 °C | 10 °C to 35 °C |
| Power | 120V/240V, ~1500W | 120V/240V, ~2000W | 120V/240V, ~2500W |
| Rack Size (D x W x H) | 36" x 24" x 29" | 36" x 24" x 46" | 36" x 24" x 46" |
| Electronics Rack Weight | 190 lbs (~90 kg) | 210 lbs (~95 kg) | 260 lbs (~120 kg) |
Selectable SanjSOURCE™ illumination models (as listed in the source; the exact model-to-tier mapping is not made explicit in the source table):
- NT220-40 / LS310-40: 365, 470, 530, 780 nm
- NT220-80 / LS310-80: 365, 405, 455, 470, 530, 625, 656, 780 nm
- NT220-44 / LS310-44: 365, 470, 530, 780, 985, 1064, 1210, 1370 nm
CTR PIEZO Calibration (available as an after-purchase option, AF-100 or AFP-200):
| AF-100 | AFP-200 | |
|---|---|---|
| Temperature Range | 20 °C to 120 °C ±1% Typ | 20 °C to 150 °C ±1% Typ |
| Leveling Adjustment | ±5 Degrees | ±2 Degrees |
| Heating/Cooling Capacity | 50 W | 500 W |
| Stage Working Area | 40 mm x 40 mm | 125 mm x 125 mm |
Probe Station (available as an after-purchase option, SPS-400 or GPS-150):
| SPS-400 | GPS-150 | |
|---|---|---|
| Chuck | 4" Vacuum Chuck | 6" Vacuum Chuck |
| X-Y Travel | 100 mm x 100 mm | 150 mm x 150 mm |
| Probes | 3 DC Probes | 3 DC Probes |
Facilities & Power Requirements
(Source Section 2)
- Typical workspace: 8 ft wide x 6 ft deep.
- Allow >12" clearance from the wall for airflow needed for rack cooling.
- EZ530: ~260 lbs (~120 kg).
- VT200 (Vibration Isolation Table): ~507 lbs (~230 kg).
- Internet connection is recommended (remote data access/tool control) but not required for tool operation.
- Compressed Dry Air (CDA) >50 psi is required for the vibration isolation table. A portable air compressor can be used if no facility line is available.
- Vacuum is required to hold the wafer. A portable vacuum pump can be used if no facility vacuum is available.
- Power: ~2500W, 120V/240V – 20A.
- Install away from large mechanical equipment or motors to avoid reduced specifications due to vibration.
- Install in as clean an environment as reasonably possible.
Optical Microscope & Illumination
(Source Section 3.1)
The Optical Microscope allows the user to change objectives and use a manual focus knob. Two main adjustments are used routinely: focusing via the frame knobs, and changing objectives on the nosepiece. The camera adapter can be rotated by loosening threaded screws with the provided blue Allen wrench.
[diagram/image in source — not reproduced here: Figure 1 Microscope Frame & C-Mount Fiber Illumination for LLGVIS8; Figure 2 C-Mount Fiber Illumination for LLGVIS8; Figure 4 Microscope Dimensions; Figure 5 Microscope Views; Figure 6 Camera]
LLGVIS8 / LLGNIR8 fiber illumination specifications:
| LLGVIS8 | LLGNIR8 | |
|---|---|---|
| Wavelength Range | 340 nm to 800 nm | 420 nm to 2000 nm |
| Numerical Aperture | 0.59 | 0.59 |
| Half Angle | 36° | 36° |
| Minimum Bend Radius | 60 mm | 60 mm |
| Core Diameter | 5 mm | 5 mm |
| Length | 8 ft (2.4 m) | 8 ft (2.4 m) |
| Temperature Range (Continuous) | -5 to 35 °C (23 to 95 °F) | -5 to 35 °C (23 to 95 °F) |
Cameras
(Source Sections 3.2–3.5)
- Visible Camera (Optional): Collects individual pixel data used by SanjVIEW™. Mounted on top of the microscope to capture images from the lens. Available in 2 Megapixel or 4 Megapixel.
- Infrared Camera: Compact longwave infrared (LWIR) thermal camera using FLIR infrared video processing architecture for advanced image processing and industry communication interfaces at low power. 12 µm pitch Vanadium Oxide (VOx) uncooled detector, 640 x 512 resolution. Available with a 2.5x lens or a 0.1–0.5x adjustable lens.
- Scientific CMOS (sCMOS) Camera (Optional): Next-generation CMOS sensor design offering extremely low noise, rapid frame rates, wide dynamic range, high quantum efficiency, high resolution, and large field of view.
- InGaAs Camera: InGaAs sensor extends sensitivity further into the infrared (900–1700 nm) than classic CCD/CMOS cameras. Supports high frame rates at full resolution, with further frame-rate increases available by selecting a smaller ROI.
Chiller Specifications
(Source Sections 3.10–3.11)
500W Internal Chiller — RMUP-500 (Optional): 6U rack-mount design; ±0.1°C temperature stability via PID control; refrigerating power up to 650W; 220V supply; front-mounted water level indicator; water temperature settable between 5°C and 35°C in constant-temperature or intelligent-control mode.
500W External Chiller:
| Model | CWUL-10DH | CWUL-10AH |
|---|---|---|
| Voltage/Frequency | AC 110V / 60Hz | AC 220V–240V / 50Hz |
| Current | 0.5–9.9A | 0.5–7.2A |
| Cooling Capacity | 750W | 750W |
| Max Pump Pressure | 1.2 bar | 1.2 bar |
| Max Pump Flow | 13 L/min | 13 L/min |
- Temperature stability: ±0.3°C.
- Placement: well-ventilated, dry environment, away from heat sources. Keep ≥30 cm from the air outlet (rear) and ≥10 cm between the two side air inlets and any obstruction.
- Use distilled water only; drain the chiller before extended non-use or transport.
- Liquid replacement: every 3 months under light usage; monthly under heavy usage.
- At the maximum flow rate (13 L/min), image vibration may be visible on high-magnification lenses (especially 100x) — not noticeable at 50x or below. To minimize this, reduce flow with the valve (clockwise reduces flow, counter-clockwise increases flow). Do not close the flow by turning the valve handle clockwise 90° while the chiller is operating. Only reduce flow when vibration is observed on a specific lens, and return to full speed for lower-magnification lenses.
Piezo Controller (AF-200)
(Source Section 3.12)
Digital Multi-Channel Piezo Controller with 20 kHz sampling rate and 1 ms cycle time. AF-200 provides 3-axis XYZ positioning with 200 x 200 x 200 µm travel range and ±2° tip-tilt adjustment.
ATEC302 Temperature Controller
(Source Section 3.13)
Bi-directional temperature controller/indicator for thermoelectric applications.
- 4 temperature zone control modes: P, PI, PD, PID, Auto Tuning, Open-Loop Control
- High-speed ADC; wide-range T/C, RTD, Thermistor input selectable
- DC power supply: 9–36V or 5V DC
- 2 programmable alarm outputs
- RS232, RS485, and USB communication with GUI software
- Supports complex program scripts for sophisticated temperature profile control
Optical Head Models
(Source Section 5, "Single/Dual TR Mount Optical Heads")
Single TR Mount Optical Heads:
| Model | Sensor | Spectral Range | Resolution | FOV | NETD |
|---|---|---|---|---|---|
| SMC40-VIS2PK | 2MP CMOS | 400 nm to 800 nm | 59 nm/pixel @100x | 2.3 x 1.4 mm @5x | 100 mK |
| SMC40-VIS4PK | 4MP CMOS | 365 nm to 1050 nm | 55 nm/pixel @100x | 2.3 x 2.3 mm @5x | 250 mK |
| SMC40-NIRIPK | InGaAs, 630 x 508 pixels | 900 nm to 1700 nm | 150 nm/pixel @100x | 3.8 x 3.0 mm @2.5x | — |
| SMC40-NIREPK | 1MP EMCCD | 480 nm to 1060 nm | 130 nm/pixel @100x | 5.3 x 5.3 mm @2.5x | — |
Included VIS Band Objectives: 5x (5SVIS35), 20x (20SVIS22), 100x (100SVIS14). Included NIR Band Objectives: 2.5x (2.55NIR12), 20x (20SNIR12).
Dual TR Mount Optical Heads:
- SMC40-V4NIPK: SMC40-VIS4PK plus SMC40-NIRIPK, plus VIS and NIR band objectives.
- SMC40-V4NEPK: SMC40-VIS4PK plus SMC40-NIREPK, plus VIS and NIR band objectives.
Additional Accessories and Options
(Source Section 5)
Infrared Sensor:
- EZIR-LW12PK / EZIR-LW12SPK: Uncooled VOx LWIR sensor, 640 x 512 pixels, 30 fps (8.6 fps for the -SPK variant), 7.5–13.5 µm spectral range, 10 mK NETD.
- L05LWIR: 0.5x lens, 24 µm/pixel resolution, FOV 15.4 mm x 12.3 mm.
- L25LWIR: 2.5x lens, 4.8 µm/pixel resolution, FOV 3.1 mm x 2.5 mm.
Other accessories:
- SA-200 SanjANALYZER-PLUS™: For advanced post-data processing and analysis.
- Optional Objectives: NUV, VIS, or NIR bands, 1x to 100x, with varied Numerical Apertures (NA) and Working Distances (WD).
- Optional Illumination Sources: Alternatives to the wavelengths included with LS310-40/-80/-44 are available on inquiry.
- VT100 Vibration Table: 30" x 36" (750 mm x 900 mm) area vibration isolation table.
- VT200 Vibration Table: 30" x 36" (750 mm x 900 mm) area vibration isolation table with dark box enclosure.