Operating SanjVIEW 7 with the Visible Camera (TR)
Operating SanjVIEW 7 with the Visible Camera (TR)
Opening and initial setup:
- Open SanjVIEW v7.0 from the Computer desktop.
- Center the sample in Project Manager and focus on the desired device.
- Confirm all indicator lights are green for your connected system.
- Select the camera to use (Infrared / Visible-Thermoreflectance / Near-Infrared). Press F1 to switch cameras.
- Click the Auto Focus tab.
- Set "Mag" to your objective (example: 5X).
- Click "Enable Motion" ON and "Center Stage" ON. (Note: the microscope may need refocusing after centering the stage.)
- Click the file icon; name your file path and click "current folder."
- Select the desired imaging operation.
Note: Transient Thermoreflectance is not available with an Infrared camera selected — it requires the Visible camera.
Steady State:
Hardware:
- Enter the desired Base Temp (°C) and click "SET" next to Set Base Temp.
- Set Stage State "ON."
- Set "Vo ON Voltage" to 7V.
Timing/Illumination:
- Set Device On Time to 10.
- Set Image Averages (#/cycle) to 10.
3D Alignment — Focus ROI:
- Select a region on the CCD image with the rectangle tool (choose a unique feature, e.g. an edge or scratch mark).
- Press "Focus ROI" to set the selected region as your ROI.
- Wait until the Focus ROI light turns green. (Zoom: hold SHIFT to zoom out, SHIFT+CLICK to zoom in.)
- Confirm "Enable 3D NanoAlign" is checked; check it if not.
3D Alignment — Capture Reference:
- After the ROI focuses, press "Capture Reference" to set the reference region.
- Wait for the Capture Ref light to turn green ("Enable Digital Anti-vibration" turns on automatically).
- Set initial Focus Tolerance, Alignment %, and Vibration Filter parameters — lights turn green when in range. (Increasing Alignment % and decreasing Vibration Filter improves alignment accuracy. Alternatively, load a prior reference.)
Start Measurement:
- Click "START Measurement."
- Progress shows in the System Status bar ("Turn OFF" after each cycle) with a "Loop Iterations" count. For TR, 9–11 loop iterations is sufficient.
- Under Save Path, confirm the directory/name (example:
C:\Data\Qualification\); append a filename. - Click "Save Every Cycle," then click "Save Data" when ready. (Save the image before stopping the measurement.)
- To stop: click "STOP MEASUREMENT," then "Return to Project Manager," or File → Quit.
Calibration:
Hardware:
- Set "Magnification" to match the objective (example: 5x).
- Set "High Temp" to 120 °C and "Base Temp" to 20 °C.
- Turn "Stage State" ON.
- Click "Set Low Temp" to initialize the chuck to the base temperature.
- Click "Use Chuck Sensor" to use the embedded chuck thermal sensor for calibration (off = use an external thermal probe).
Timing/Illumination:
- Set Stage Heating Time to 40.
- Set Image Averages to 50.
3D Alignment — Focus ROI / Capture Reference: same procedure as Steady State above.
Start Measurement:
- Click "START Measurement." The system cycles through temperatures, showing "Calibration Done" after each cycle and a Loop Iterations count.
- Select the region on Thermal Image View to view the Calibration Factor (shown in "Mean CTR").
- Under Save Path, confirm directory/name (example:
C:\Data\Qualification\Training). - Check "Save Every Cycle," then click "Save Data." (Save before stopping.)
- Stop via "STOP MEASUREMENT," "Return to Project Manager," or File → Quit.
Failure Analysis (FA) Mode:
Parameter Setup:
- In Project Manager, change "Cam Selection (F1)" to "VISIBLE."
- Uncheck "INT Vo 20mA Range" (green = checked, grey = unchecked).
- File → Options to open a new window.
- Software tab → set "FA Mode Pulse Width" to Long (15 Frames).
- Return to Project Manager, click "FA Mode" to open the FA Mode window.
Process: (confirms the device is biased and current is flowing, before using Movie or Transient mode)
- Go to the "Biasing" tab.
- Change Vo(V) to 7.000.
- Click "Update Values" to apply voltages.
- Check that "Peak Voltage (V)" and "Peak Current (I)" read near 7V and 70 mA for device 2 (Center Diode). (If current is much lower than expected, confirm "INT VO 20mA Range" is unchecked in Project Manager.)
Save Data:
- File → Save Data.
- Click File Browser, select the target folder, click "Current Folder" (example:
C:\Data\Qualification\Training). - Enter the desired file name (example: "FA-File").
- Click "Save."
- Click "Return" to exit the Save Microsanj Data pop-up. (Remember to update the Microsanj Data Save Path before a new dataset, to avoid overwriting prior data.)
Transient Thermoreflectance:
System Status:
- Change camera to VISIBLE.
- Click "Transient Thermoreflectance."
- Click the "Measurement Settings" tab.
Measurement Setting (alignment — two approaches):
First approach (Focus Region + Capture Reference):
- Select a region on the CCD image with the rectangle tool (unique feature, e.g. edge/scratch).
- Press "Focus ROI"; wait for the Focus ROI light to turn green.
- Press "Capture Reference"; wait for the Capture Ref light to turn green.
Second approach (Load Reference):
- Click "Load Reference."
- Enter the calibration file path (browse icon), then click "LOAD."
- Wait for the "Load Reference" light to turn green.
- Click "Enable 3D Motion" and "Enable DAV."
- Set "Alignment %" to 99.00.
Transient Thermoreflectance — single image: (thermal image should appear before proceeding)
- In Measurement Settings, set "Voltage to Device (V)" to 7V.
- Click "Update Values" to apply voltages.
- Review the auto-populated "DUT Pulse," "LED width," and "Acq Period" values (changeable, but left as-is in this example).
- Click "Start Measurement."
- Wait ~30 s or until noise averages out, then File → Save Data.
- Click File Browser, choose the save location, enter a file name, click "Save."
- Click "Measurement Running" to stop.
Transient Thermoreflectance — series:
- Set "Voltage to Device (V)" to 7V.
- Click "Update Values."
- Review auto-populated "DUT Pulse," "LED width," "Acq Period" (changeable).
- Set "Image Delay" to 0s; click "Update Delay."
- Go to File → Setup Sweep.
- Click File Browser, choose the save location ("current folder"); append the desired file name.
- Enter "Number Delay Images" (example: 10).
- Enter "Delay Step" (example: 50 µs — the DUT Pulse increment per frame).
- Enter "Ave time per frame" (example: 30 s).
- Click "START" to begin thermal imaging and data collection.
- When the designated number of images has been collected, the "start" button turns green again; click "close" to exit the dialog, then click "measurement running" to stop the process.
SanjAnalyzer (Visible camera path):
System Status:
- Confirm camera is set to VISIBLE.
- Click "SanjAnalyzer" to open the "SanjVIEW Image Analyzer" window.
Process Data:
- Select the "Calibration" tab.
- Select "Point to Point" under the "Method" dropdown (opens a "Load CTR Map" window).
- Click the Browse icon and select the calibration image.
- Click "LOAD" to overlay the calibration image onto your selected test image.
- In the file window (top left), click the Browse icon and double-click the file to analyze. (If the file is not listed, update the directory with "UP Dir.")
- Drag an ROI box across the specimen with the rectangle tool to measure temperatures (up to 5 ROI boxes; hold Ctrl to select additional boxes).
- Adjust temperature scale and image averaging factors as desired (optional).
- Select the "Settings" tab, choose a save path (Browse icon), and click "Save Image Current View."
- To process a series: enter the number of files into "Number of Images in Series" and click "Process Series." The ROI Mean graph plots mean temperature of the selected ROIs over time. (Right-click the graph → Export → "Export Data to Clipboard" to export the data to a table.)