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Overview

Overview

The NT220 is Microsanj's transient thermoreflectance imaging system (Visible & NIR Camera configuration), used to generate thermal images and temperature measurements of microelectronic devices under test. The system combines:

  • A visible or NIR camera with LED illumination (530 nm LED for the Visible Camera; 1064 nm LED for the NIR Camera)
  • A 20X objective lens / microscope
  • A piezo-driven 3D motion and alignment stage ("4D Nano Align")
  • Control software organized around a Project Manager that stores microscope and brightness settings for reuse across measurement modes

From the control software, the instrument supports three primary measurement workflows, plus a companion image-processing application:

  • Calibration — establishes the sample's Thermoreflectance Coefficient (Cth) by cycling the sample through a temperature range (e.g., 20 °C to 120 °C) and measuring the reflectance response.
  • Transient Image — captures pulsed/transient thermal images of a powered device (device pulse width and duty cycle controlled).
  • Steady State Image — captures steady-state thermal images of a device held at a fixed ON/OFF voltage condition.
  • SanjAnalyzer PLUS — a separate image-processing application used to open calibration and transient/steady-state image files, correct for thermal expansion, and measure ΔT (temperature difference) across a device.

This guide is based on the Microsanj-supplied test sample (see Microsanj Test Sample below) and walks through the standard system setup, calibration, imaging, and analysis sequence.