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Safety Precautions

EZ530 Therm System

Safety Precautions (Source Section 1.1–1.2) High temperature: Do not touch the thermal plate while it is in operation — contact may cause severe burns. No user-serviceable parts inside the EZ-THERM controller. Do not remove covers. Exposed AC power can be pres...

Specifications

EZ530 Therm System

Specifications NT220 Platform Specification Table (Source Section 5, "Nano THERM Specification." The EZ530 corresponds to the PKG-2 column — see Overview note above.) Parameter Base PKG-1 PKG-2 Transient Response 50 ns LED Pulse Duration (FWHM), 12.5 ns Delay ...

Setup and Installation

EZ530 Therm System

Setup and Installation Connecting the EZ-THERM System (Source Section 4. Ensure all modules are powered off before making any connections. Complete all connections and power on all modules before running the SanjVIEW 7 software.) 4.1 Power up Eazy-THERM. Befor...

Maintenance

EZ530 Therm System

Maintenance Chiller maintenance (Source Section 3.11): Replace chiller liquid every 3 months under light usage, or monthly under heavy usage. Use distilled water only; drain before extended non-use or transport. Keep the unit ≥30 cm from obstructions at the re...

Appendix — Thermoreflectance Technical Reference

EZ530 Therm System

Appendix — Thermoreflectance Technical Reference (Source Appendix A/B — retained here as background reference material.) Thermoreflectance Imaging Fundamentals Thermoreflectance imaging is based on a linear change in a material's reflection coefficient with te...

Source Documents

EZ530 Therm System

Source Documents This reference was compiled from: EZ530 Therm User Manual [source-pdf].txt — text extraction of the Microsanj LLC "Manual User Guide, EZ-THERM Series" (Copyright 2025), located at: /tmp/claude-1000/-home-davidspitzer-Android-Auto-replacement/f...

SanjVIEW 7 Software — Overview

EZ530 Therm System Operation

SanjVIEW 7 Software — Overview (Source Section 7) The EZ-THERM General Purpose Thermal Analyzer is a Thermoreflectance (TR) system: a benchtop precision analysis tool for static and transient thermal imaging of active semiconductors from millimeter to micron s...

Operating SanjVIEW 7 with the Visible Camera (TR)

EZ530 Therm System Operation

Operating SanjVIEW 7 with the Visible Camera (TR) (Source Section 8) Opening the software and setting up a session: Open SanjVIEW v7.0 from the computer desktop; center the sample in Project Manager and focus on the target device. System Status — ensure all in...

SanjVIEW 7 for Near Infrared (NIR) Camera

EZ530 Therm System Operation

SanjVIEW 7 for Near Infrared (NIR) Camera (Source Section 10) A visible camera (mono or color) captures images in the visible light spectrum (400–780 nm), producing images resembling human vision. A NIR camera captures near-infrared light (780–1400 nm), invisi...

SanjVIEW 7 for Infrared Camera (IR)

EZ530 Therm System Operation

SanjVIEW 7 for Infrared Camera (IR) (Source Section 11) Opening the software and setting up a session: Open SanjVIEW v7.0 from the desktop; center the sample in Project Manager and focus on the target device. System Status — ensure all indicator lights are gre...

Device Biasing, Trigger Function, and Timing

EZ530 Therm System Operation

Device Biasing, Trigger Function, and Timing (Source Section 9) 9.1 Diagram for TR Imaging — SanjCONTROLLER PLUS™ signals: A. VI EXT: Input for fixed DC voltage up to +60V. B. VO EXT: Pulsed output of the DC voltage applied to VI EXT. C. AUX INT: Up to ±10V DC...

Overview

NT220 System Quick Start

Overview The NT220 is Microsanj's transient thermoreflectance imaging system (Visible & NIR Camera configuration), used to generate thermal images and temperature measurements of microelectronic devices under test. The system combines: A visible or NIR camera ...

Quick Start Steps

NT220 System Quick Start

Quick Start Steps This is the common system setup sequence performed at the start of every measurement mode (Calibration, Transient Image, and Steady State Image) before proceeding to the mode-specific steps. Check System Status. Make sure the System Status in...

Microsanj Test Sample

NT220 System Quick Start

Microsanj Test Sample Sample Structure The Microsanj test sample layer stack (from the source diagram): a SiO2 (200 nm) top layer; Au(130 nm)/Cr(5 nm) contact pads on either side; a SiO2 (300 nm) layer; a Si (n++) substrate core; and a SiO2 (300 nm) bottom lay...

Calibration

NT220 System Quick Start

Calibration Perform the common setup in Quick Start Steps, then click Calibration to start. Continue with the steps below. Hardware Set Base Temp to 20 °C and click Set Low Temp. Note: The temperature set on the 4D Nano Align should change. If it does not, mak...

Transient Image

NT220 System Quick Start

Transient Image Perform the common setup in Quick Start Steps, then click Transient Image to start. Continue with the steps below. Hardware Set the Base Temp to 20 °C, then click Set Base Temp. Note: Microscope Settings are auto-filled from Project Manager (no...

Steady State Image

NT220 System Quick Start

Steady State Image Perform the common setup in Quick Start Steps, then click Steady State to start. Continue with the steps below. Hardware Set the Base Temp to 20 °C. Set Device ON Voltage to 5 V and Device OFF Voltage to 0 V. Note: Microscope Settings are au...

SanjAnalyzer PLUS – Image Processing

NT220 System Quick Start

SanjAnalyzer PLUS – Image Processing SanjAnalyzer PLUS is the companion application used to open and process saved calibration, transient, and steady-state image files. Its main view includes a File Window, a Working Image pane, a Reference Image pane, and an ...