Overview

Overview

The EZ530 Therm system (referred to throughout the source manual as the EZ-THERM Series / Eazy-THERM) is a benchtop, non-contact thermal imaging and analysis platform built around Thermoreflectance (TR) microscopy, with optional Infrared (IR) and Near-Infrared (NIR) imaging channels. It is a precision analysis tool for static (steady-state) and transient thermal imaging of active semiconductor devices, at scales ranging from millimeter down to micron/sub-micron.

What it measures: The system measures device surface temperature indirectly by detecting the relative change in optical reflectivity of a sample as its temperature changes (thermoreflectance), and/or by measuring infrared thermal emission (IR mode). It can simultaneously support up to three different sensors (Visible/TR, IR, and NIR/InGaAs).

Hardware family / platform notes (internal):

• The underlying electronics/optics platform is referred to in the specification table (Section 5 of the source) as the NT220 Platform, offered in three power/configuration tiers: Base, PKG-1, and PKG-2.
• The Facilities Requirements section of the source manual is internally inconsistent about naming: the Table of Contents heading reads "NT220 Footprint with Dark box and Vibration Isolation Table," while the body text for the same section is headed "EZ530 Footprint with Dark box and Vibration Isolation Table." Based on the matching Power Requirement (~2500W, 120V/240V, 20A) and matching electronics rack weight (~260 lbs / ~120 kg), the EZ530 designation corresponds to the PKG-2 configuration tier of the NT220 platform. This cross-reference is inferred from matching numbers in the source, not stated explicitly as such — flag for confirmation if this mapping needs to be authoritative.
• The source manual's software/UI descriptions (Section 7 and Figure captions) repeatedly reference the EZ500A and the EZ500A SanjCONTROLLER module (e.g., "The EZ500A SanjVIEW software controls two outputs from the EZ500A SanjCONTROLLER module," Figure 2 caption: "EZ500A with Microsanj test sample in DC mode"). This indicates the EZ-THERM Series / SanjVIEW 7 software and control architecture is shared across at least the EZ500A and EZ530 (NT220/PKG-2) hardware variants — the manual was evidently written as a general EZ-THERM Series document covering multiple rack/model configurations, of which the EZ530 is one.

Major system components (per source Section 3, "System Description" — any system shipped to a customer includes):

1. Optical Microscope
2. Camera (Visible / IR / NIR / sCMOS / InGaAs, per configuration)
3. Standard Rack Models
4. Probe Station (Option)

Core software: The system is operated through SanjVIEW™ v7.0, embedded software running on the SanjCONTROLLER+ integrated desktop computer, which connects and manages all hardware modules. SanjVIEW 7 provides: Project Manager, Transient Thermoreflectance, Movie Mode, FA (Failure Analysis) Mode, Calibration, and SanjANALYZER™.