Specifications
Specifications
Facility Requirements
| Item | Value |
|---|---|
| Typical workspace | 8 ft wide × 6 ft deep |
| Wall clearance | >12 in, needed for rack cooling air flow |
| NT220 weight | ~260 lbs (~120 kg) |
| VT200 weight | ~507 lbs (~230 kg) |
| Internet connection | Recommended for remote data access/tool control; not required for operation |
| Compressed Dry Air (CDA) | >50 psi required for the vibration isolation table (portable compressor acceptable if no facility line) |
| Vacuum | Required to hold the wafer (portable vacuum pump acceptable if no facility supply) |
| Power | ~2500 W, 120V/240V – 20A |
Other recommendations: install away from large mechanical equipment/motors (vibration can degrade specifications); install in as clean an environment as possible to prevent dust/particle contamination of measurements.
NT220 Platform Specification
| Parameter | Base | PKG-1 | PKG-2 |
|---|---|---|---|
| Transient Response | 50 ns LED pulse duration (FWHM), 12.5 ns delay resolution | (same) | (same) |
| Operating System | SanjCONTROLLER™ with embedded SanjVIEW (system management, acquisition, processing, analysis) | ||
| Selectable SanjSOURCE™ models | NT220-40: LS310-40 — 365, 470, 530, 780 nm | NT220-80: LS310-80 — 365, 405, 455, 470, 530, 625, 656, 780 nm | NT220-44: LS310-44 — 365, 470, 530, 780, 985, 1064, 1210, 1370 nm |
| Display | 30-inch 4K monitor, keyboard & mouse | ||
| Operating temperature | 10 °C to 35 °C | 10 °C to 35 °C | 10 °C to 35 °C |
| Power | 120V/240V, ~1500 W | 120V/240V, ~2000 W | 120V/240V, ~2500 W |
| Rack size (D×W×H) | 36" × 24" × 29" | 36" × 24" × 46" | 36" × 24" × 46" |
| Electronics rack weight | 190 lbs (~90 kg) | 210 lbs (~95 kg) | 260 lbs (~120 kg) |
CTR Piezo Calibration (available as an after-purchase option):
| Parameter | AF-100 | AFP-200 |
|---|---|---|
| Temperature range | 20 °C to 120 °C ±1% Typ | 20 °C to 150 °C ±1% Typ |
| Leveling adjustment | ±5 degrees | ±2 degrees |
| Heating/cooling capacity | 50 W | 500 W |
| Stage working area | 40 mm × 40 mm | 125 mm × 125 mm |
Probe Station (available as an after-purchase option):
| Parameter | SPS-400 | GPS-150 |
|---|---|---|
| Chuck | 4" vacuum chuck | 6" vacuum chuck |
| X-Y travel | 100 mm × 100 mm | 150 mm × 150 mm |
| Probes | 3 DC probes | 3 DC probes |
Optical Microscope / Fiber Illumination (LLGVIS8 / LLGNIR8)
| Parameter | LLGVIS8 | LLGNIR8 |
|---|---|---|
| Wavelength range | 340 nm to 800 nm | 420 nm to 2000 nm |
| Numerical aperture | 0.59 | 0.59 |
| Half angle | 36° | 36° |
| Minimum bend radius | 60 mm | 60 mm |
| Core diameter | 5 mm | 5 mm |
| Length | 8 ft (2.4 m) | 8 ft (2.4 m) |
| Temperature range (continuous) | -5 to 35 °C (23 to 95 °F) | -5 to 35 °C (23 to 95 °F) |
[diagram/image in source — not reproduced here: Figures 1, 2, 4, 5, 6 — microscope frame, C-mount fiber illumination, microscope dimensions/views, camera]
Cameras
- Visible camera: 2 megapixel or 4 megapixel; mounted atop the microscope to capture images from the lens.
- Infrared (LWIR) camera: compact longwave infrared thermal camera using FLIR infrared video processing architecture; low power consumption. 12 µm pitch Vanadium Oxide (VOx) uncooled detector, 640 × 512 resolution. Available with 2.5x lens or 0.1–0.5x adjustable lens.
- InGaAs camera: InGaAs sensor for extended infrared spectral sensitivity, 900–1700 nm, with high sensitivity and high frame rates at full resolution (higher still with a smaller ROI selected).
- Visible/NIR camera comparison (Section 10): a visible (monochrome or color) camera captures 400–780 nm to produce human-vision-like high resolution images; a NIR camera captures 780–1400 nm, invisible to the human eye, useful beyond visible light and in low-light conditions.
SanjSOURCE (illumination module)
Nanosecond multi-wavelength light source, auto-selectable, up to eight LED wavelengths: 365, 405, 455, 470, 530, 625, 656, and 780 nm (visible), plus 970, 1050, 1300 nm (near-infrared). Other wavelengths available on request.
Rear-panel connectors:
| Connector | Function |
|---|---|
| A. LED Output | Bias external LEDs — 2.5 A peak pulsed current, 1 A DC |
| B. LED Trigger IN | Trigger the light source externally |
| C. LED Trigger OUT | For external light sources |
| D. Device Trigger IN (option) | Externally trigger the NT220 system |
| E. Device Trigger OUT | Trigger external power supplies — 5V into a 50 Ω load. Note: outputs 10V into high impedance and sources 200 mA max into a short circuit |
4D Nano Align / Piezo Controller (AF-100)
4D Nano Align houses the power source for the thermal stage's thermo-electric element and the piezo controller. The ATEC302 temperature controller monitors and sets stage temperature manually. Depending on configuration, 4D Nano supports Auto Focus 100 (AF-100) or Auto Focus 200 (AF-200).
Piezo Controller for AF-100: voltage amplifier with closed-loop control and a PC-interfaced display showing actuator position, operating mode, and internal amplifier temperature. AF-100 provides 3-axis XYZ positioning, 100 × 100 × 100 µm travel range, ±5° tip-tilt adjustment. Applications include drift-compensated control of piezo actuators with resistive measurement systems, lab, and industrial use.
600 W Rack Mount Chiller
19" wide, 3U-height, compressor-refrigerant recirculating liquid chiller rated at 600 W (2047 BTU/hr at 25 °C liquid & ambient).
| Parameter | Value |
|---|---|
| Operational temperature range | 0–40 °C (ambient and liquid) |
| Pump | 10 manual levels: 3.5 LPM (level 1) to 6.5 LPM (level 10) |
| Liquid coolant | Koolance 702 (required — see Maintenance) |
| Power source | 100–240 VAC, 50–60 Hz |
| Maximum operating temperature | 40 °C |
| Minimum operating temperature | -20 °C |
ATEC302 Temperature Controller
Bi-directional temperature controller/indicator for thermoelectric applications.
- 4 temperature zone control modes: P, PI, PD, PID, Auto Tuning, Open-Loop Control
- High-speed ADC; wide-range T/C, RTD, Thermistor input, selectable
- DC power supply: 9–36V or 5V DC
- 2 programmable alarm outputs
- RS232, RS485, and USB communication with GUI software
- Supports complex program scripts for sophisticated temperature profile control
Optical Heads (Single TR Mount)
Note: the source PDF's table extraction interleaved these columns; values below are reconstructed by matching row-position across the four model columns and should be spot-checked against the original PDF figure before external use.
| SMC40-VIS2PK | SMC40-VIS4PK | SMC40-NIRIPK | SMC40-NIREPK | |
|---|---|---|---|---|
| Sensor | 2MP CMOS | 4MP CMOS | 630 × 508 pixels InGaAs | 1MP EMCCD |
| Wavelength range | 400 nm to 800 nm | 365 nm to 1050 nm | 900 nm to 1700 nm | 480 nm to 1060 nm |
| Resolution @100x | 59 nm/pixel | 55 nm/pixel | 150 nm/pixel | 130 nm/pixel |
| Field of View | 2.3 × 1.4 mm @5x | 2.3 × 2.3 mm @5x | 3.8 × 3.0 mm @2.5x | 5.3 × 5.3 mm @2.5x |
| NETD | 100 mK | 250 mK | — (not stated) | — (not stated) |
Included VIS band objectives: 5x (5SVIS35), 20x (20SVIS22), 100x (100SVIS14). Included NIR band objectives: 2.5x (2.55NIR12), 20x (20SNIR12).
Dual TR mount optical heads:
- SMC40-V4NIPK: SMC40-VIS4PK plus SMC40-NIRIPK, plus VIS and NIR band objectives
- SMC40-V4NEPK: SMC40-VIS4PK plus SMC40-NIREPK, plus VIS and NIR band objectives
Additional Accessories and Options
| Item | Spec |
|---|---|
| EZIR-LW12PK / EZIR-LW12SPK (infrared sensor) | Uncooled VOx LWIR sensor, 640 × 512 pixels, 30 fps, 7.5–13.5 µm spectral range, 10 mK NETD. EZIR-LW12SPK frame rate is 8.6 fps. |
| L05LWIR | 0.5x lens; resolution 24 µm/pixel; FoV 15.4 × 12.3 mm |
| L25LWIR | 2.5x lens; resolution 4.8 µm/pixel; FoV 3.1 × 2.5 mm |
| SA-200 SanjANALYZER-PLUS™ | Advanced post-data processing & analysis |
| Optional Objectives | NUV, VIS, or NIR bands, 1x to 100x, varied Numerical Apertures (NA) and Working Distances (WD) |
| Optional Illumination Sources | Wavelengths other than those in LS310-40/-80/-44; inquire with Microsanj |
| VT100 Vibration Table | 30" × 36" (750 × 900 mm) area vibration isolation table |
| VT200 Vibration Table | 30" × 36" (750 × 900 mm) area vibration isolation table with dark box enclosure |
Output Module Signal Reference
| Signal | I/O | Function |
|---|---|---|
| VI EXT (A) — DC voltage in | Input | Used in "Relay" mode for pulsing device. ±60V, 3A maximum |
| VO EXT (B) — DC voltage in | Output | Modulated output of VI DC input voltage |
| AUX INT (C) — Aux out | Output | ±10V, 500 mA max (not pulsed) |
| VO INT (D) — Voltage out | Output | Main output, ±10V, 1A maximum. Output when used in "Relay" mode: ±60V, 3A max |
| VO INT (D), 20 mA Range | Output | 500 Ω output impedance, approximately 2 mA/V into low impedance |
| TRIG (E) — Trigger out (Movie mode only) | Output | Synchronizes external equipment with Movie mode. TTL high-impedance output |
Device Biasing / Trigger Connectors (SanjCONTROLLER PLUS™)
| Connector | Function |
|---|---|
| A. VI EXT | Input for fixed DC voltage up to +60V |
| B. VO EXT | Pulsed output of DC voltage input to VI EXT |
| C. AUX INT | Up to ±10V DC for secondary DUT bias |
| D. VO INT | Up to ±10V pulse for DUT pulsed bias |
| E. TRIG | Internal mode output — 5V TTL pulse to sync external DUT bias supply |
[diagram/image in source — not reproduced here: Section 9.2–9.8 timing/biasing diagrams — "Relation to Timing Sequence for Transient Analysis," "Internal Biasing," "External DC Supply," "Triggering an External Source," "Slave Mode," "Transient Timing Signal," "Transient Software with Light Emission"]
Camera / LED Compatibility (NIR mode)
| Camera Selection (F1) | Select LED (F3) |
|---|---|
| VISIBLE | 405, 470, 530, 780 nm |
| NIR | 1050, 1100, 1200, 1300 nm |
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